4 2. 1. Main Features Turbopumps TMH 521 PTMU 521 P with the TC 600 form an unit. Voltage is supplied by the power supply (see Section 11. Accessories). Oct 24, 2011 Fully rebuilt Pfeiffer Vacuum TMU 521 P Turbo Pump with TC 600 turbo pump controller.
This Turbomolecular Drag Pump has a pumping speed of 510ls (N2) and a final pressure of 5 x 1010. Pfeiffer Balzers TMU521 TMU521 Turbomolecular Vacuum Drag Pump Turbo Pump with PM Z01 251 Fan, TC 600 PMC C Electronic Drive Unit Turbo Controller TMU521 Pump Specifications: Mod Number: PM P02 84 Pfeiffer Vacuum TMU 521 P, PMP with TC 600, PMC, Turbo Pump, DN 160 ISOK Inlet Flange, DN 25 ISOKF Outlet Flange. 4 2. 1. Main Features Turbopumps TMH521 PTMU 521 P with the TC 600 form an unit.
Voltage is supplied by the power unit (see Accessories). On delivery the pumps are set up for operations Betriebsanleitung Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 PM 0496 BEL (0512) TMH 521 P TMU 521 P Index Page Page 1. Operating Instructions Turbomolecular Drag Pumps TMH 520 TMU 520 TMH 520 P TMU 520 P PM 800 309 BEJ (0008) The Pfeiffer TMU 521 with the TC 600 form a complete unit.
Water cooling or air cooling is required. The pump has a wear free permanent magnetic bearing on the high vacuum side and an oil circulatory lubricated ball bearing with ceramic balls on the forevacuum side.